Diffusion silicon piezoresistive pressure transmitter is the mainstream pressure transmitter in the market, and the diffusion silicon piezoresistive pressure transmitter has been widely used in water treatment, hydraulic system, HVAC industry, automation field, petrochemical, medical, food, environmental protection industry. Long-term market use has proven the performance of diffusion silicon piezoresistive pressure transmitters.
Diffusion silicon piezoresistive pressure transmitters are constructed by using the piezoresistive effect of silicon wafers. The silicon wafer is used as the elastic element of the pressure transmitter, and then the process of applying an integrated circuit on the silicon wafer diaphragm spreads a set of equivalent resistors in a specific direction of the silicon wafer, and the resistors are connected into a bridge, and the silicon wafer is placed in the pressure transmitter cavity. When the pressure changes, the silicon wafer is strained, so that the strain resistance directly diffused on it changes proportionally to the measured pressure, and then the corresponding voltage output signal is obtained by the bridge circuit.
When the force diffuses the silicon piezoresistive pressure transmitter on the silicon crystal, the crystal lattice of the crystal is deformed, causing the carriers to scatter from one energy valley to another, causing the mobility of the carriers to change, disturbing the average amount of carriers in the longitudinal and transverse directions, and thus changing the resistivity of the silicon. This variation varies with the orientation of the crystal, so the piezoresistive effect of silicon is related to the orientation of the crystal. The piezoresistive effect of silicon is different from that of metal, the change of resistance of silicon with pressure mainly depends on the change of resistivity, and the change of metal resistance mainly depends on the change of geometric size, and the sensitivity of the former is 50~100 times greater than that of the latter.
Diffusion silicon piezoresistive pressure transmitters are also subdivided into different models for site-specific pressure measurement for special working conditions. For example, explosion-proof type, high-temperature type, impact-resistant type, waterproof type, and non-type diffusion silicon piezoresistive pressure transmitter used in the petrochemical industry.
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