The diffusion silicon pressure sensor has the characteristics of high accuracy, good stability, fast response speed, shock resistance, strong anti-interference, compact structure, and convenient installation. The diffusion silicon pressure sensor is suitable for pressure measurement in liquid or gas and process industries, and is an ideal pressure measurement instrument in the field of industrial automation.
Diffusion silicon pressure sensors have an important technical parameter, which is temperature compensation. Temperature will change the density of gas or liquid, pressure and viscosity will change, and the corresponding liquid level and differential pressure will also change. Temperature compensation is used to correct the measurement data of diffusion silicon pressure sensors and improve the measurement accuracy of diffusion silicon sensors.
The temperature compensation of diffusion silicon pressure sensors can generally be divided into internal compensation and external compensation. Internal compensation reduces the zero and full range temperature coefficients through the design, manufacturing process, packaging materials, and form of the sensor, especially by controlling the doping concentration of the diffusion barrier to control the impact of temperature on the diffusion silicon sensor. In addition to internal compensation, we also need external compensation for diffusion silicon pressure sensors. There are various forms of external compensation for diffusion silicon pressure sensors, including two-point compensation through a fixed resistance network and three-point compensation through a thermistor network.
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